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Fast Simulation of Electro-Thermal MEMS

T. Bechtold
E. B. Rudnyi
Organization: Albert Ludwig University
Department: IMTEK–Institute for Microsystem Technology
J. G. Korvink
Organization: University of Freiburg
Department: Department of Microsystems Engineering Lab of Simulation
Book information

Publisher: Springer (Heidelberg)
Copyright year: 2007
ISBN: 3540346120
Medium: Hardcover
Pages: 175
Out of print?: N
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This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial, which uses Mathematica 5.2, is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

*Engineering > Finite Element Methods