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Numerical simulation of vertical temperature distribution in heterogeneous multilayer structure with Mathematica

Hee-Joong Yun
Organization: Mokwon University
Department: Dept of Optical and Electronic Physics
Journal / Anthology

Applied Surface Science
Year: 2003
Volume: 214
Issue: 1-4
Page range: 312-318

Temperature distributions produced by a scanning cw Nd:YAG (1.06mm) laser beam in a heterogeneous multilayer structure (poly-Si/SiO(subscript)2/Si) are calculated using Mathematica. A solution to the nonlinear heat equations including temperature-dependent thermal parameters is solved numerically for the temperature distributions of the heterogeneous multilayer structure. We present the linear temperature distributions of multilayer along the full depth of structure as a function of normalized thickness of the structure. This calculation scheme could cover a wide range of calculation of the temperature distribution produced by a scanning heat source in the heterogeneous multilayer structure.

*Science > Chemistry
*Science > Physics > Thermodynamics and Statistical Mechanics

Numerical calculation, Temperature distribution, Multilayer structure, Mathematica