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An Analytical Study of First- and Third-Order Chromatic Aberrations for Hutter's Electrostatic Immersion Lenses

Z. Liu
Organization: Peking University
Department: Department of Electronics
J. Ximen
Journal / Anthology

Year: 1999
Volume: 110
Issue: 10
Page range: 463-470

In this paper electron optical canonical aberration theory and the generalized integration transformation have been applied to Hutter's electrostatic immersion lens whose axial potential distribution has an exponential-arctangent form. It is the generalized integration transformation that makes the analytical study of higher-order chromatic aberrations simple and feasible. As a result, analytical expressions of first- and third-order chromatic aberrations for such electrostatic immersion lenses have first been derived and numerical computations have been carried out by using a computer algebra language Mathematica. It is expected that this work may be useful for estimating first- and third-order chromatic aberrations in electrostatic immersion lenses.

*Science > Physics > Optics