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Curvilinear-Axis Focusing and Aberration Theory of Wide Electron Beams for Combined Immersion Magnetic-Electrostatic Lens Systems
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| Organization: | Xi'an Jiaotong University |
| Department: | Department of Electronics Science and Technology |
| Organization: | Xi'an Jiaotong University |
| Department: | Department of Electronics Science and Technology |
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Curvilinear-axis Gaussian electron optical properties and aberration characteristics of wide electron beams for combined immersion magnetic-electrostatic lenses are studied. Based on general wide beam and curvilinear-axis theory, paraxial trajectory equations in local orthogonal coordinates are obtained, and all of the second-order curvilinear-axis aberration coefficients are derived using a symbolic manipulation software Mathematica. The present paper lays a theoretical groundwork for further studies on curvilinear-axis focusing and aberration theory for the combined immersion magnetic-electrostatic lenses.
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Curvilinear-axis electron optics, combined immersion magnetic-electrostatic lenses, curvilinear-axis aberrations
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