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Study on Lie algebraic deflection aberration theory for combined magnetic focusing-deflection systems

H. Kangyan
Tiantong Tang
Organization: Xi'an Jiaotong University
Department: Department of Electronics Science and Technology
T. Chaoyang
Journal / Anthology

Year: 1999
Volume: 110
Issue: 6
Page range: 271-278

Lie algebraic deflection aberration theory is employed to derive high-order canonical aberrations of combined magnetic focusing-deflection systems. With the aid of the computer symbolic manipulation software Mathematica, all the third- and fifth-order aberrations of the combined systems are feasibly obtained. The present paper lays a groundwork for further studies on higher-order aberration computation and optimized design for scanning probe systems.

*Science > Physics > Optics